Invention Grant
- Patent Title: Method and apparatus for imaging three-dimensional structure
- Patent Title (中): 三维结构成像方法及装置
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Application No.: US12654698Application Date: 2009-12-29
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Publication No.: US07990548B2Publication Date: 2011-08-02
- Inventor: Noam Babayoff , Isaia Glaser-Inbari
- Applicant: Noam Babayoff , Isaia Glaser-Inbari
- Applicant Address: IL Yehuda
- Assignee: Cadent Ltd.
- Current Assignee: Cadent Ltd.
- Current Assignee Address: IL Yehuda
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: IL125659 19980805
- Main IPC: G01B11/24
- IPC: G01B11/24
Abstract:
An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.
Public/Granted literature
- US20100165357A1 Method and apparatus for imaging three-dimensional structure Public/Granted day:2010-07-01
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