Invention Grant
- Patent Title: Scanning electron microscope
- Patent Title (中): 扫描电子显微镜
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Application No.: US12188870Application Date: 2008-08-08
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Publication No.: US07989768B2Publication Date: 2011-08-02
- Inventor: Akira Ikegami , Minoru Yamazaki , Hideyuki Kazumi , Koichiro Takeuchi , Hisaya Murakoshi
- Applicant: Akira Ikegami , Minoru Yamazaki , Hideyuki Kazumi , Koichiro Takeuchi , Hisaya Murakoshi
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2007-207342 20070809
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/28
Abstract:
A scanning electron microscope having a charged particle beam that when in a state being irradiated toward a sample, a voltage is applied to the sample so that the charged particle beam does not reach the sample. The scanning electron microscope also detects information on a potential of a sample using a signal obtained, and a device for automatically adjusting conditions based on the result of measuring.
Public/Granted literature
- US20090039264A1 ELECTRON MICROSCOPE Public/Granted day:2009-02-12
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