Invention Grant
- Patent Title: Methods of manufacturing nanotubes having controlled characteristics
- Patent Title (中): 制造具有受控特性的纳米管的方法
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Application No.: US11107125Application Date: 2005-04-15
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Publication No.: US07989349B2Publication Date: 2011-08-02
- Inventor: Gurtej S. Sandhu , Terry L. Gilton
- Applicant: Gurtej S. Sandhu , Terry L. Gilton
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: B82B3/00
- IPC: B82B3/00 ; B82B1/00

Abstract:
A method of forming a plurality of nanotubes is disclosed. Particularly, a substrate may be provided and a plurality of recesses may be formed therein. Further, a plurality of nanotubes may be formed generally within each of the plurality of recesses and the plurality of nanotubes may be substantially surrounded with a supporting material. Additionally, at least some of the plurality of nanotubes may be selectively shortened and at least a portion of the at least some of the plurality of nanotubes may be functionalized. Methods for forming semiconductor structures intermediate structures, and semiconductor devices are disclosed. An intermediate structure, intermediate semiconductor structure, and a system including nanotube structures are also disclosed.
Public/Granted literature
- US20060233694A1 Nanotubes having controlled characteristics and methods of manufacture thereof Public/Granted day:2006-10-19
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