Invention Grant
- Patent Title: Polishing method and polishing apparatus
- Patent Title (中): 抛光方法和抛光装置
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Application No.: US11508140Application Date: 2006-08-23
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Publication No.: US07989348B2Publication Date: 2011-08-02
- Inventor: Kuniaki Yamaguchi , Tsuneo Torikoshi
- Applicant: Kuniaki Yamaguchi , Tsuneo Torikoshi
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2005-246509 20050826
- Main IPC: H01L21/302
- IPC: H01L21/302

Abstract:
A polishing method that carries out a multi-step polishing process with improved polishing conditions (polishing recipe) while omitting measurement of the surface conditions of a substrate, as carried out between polishing steps thereby increasing the throughput. The polishing method for polishing workpieces by repeating the sequential operations of taking a workpiece out of a cassette in which a plurality of workpieces are stored, carrying out multi-step polishing of a surface of the workpiece and returning the workpiece to the cassette, includes carrying out one of the following two polishing processes for the workpiece taken out of the cassette: a first polishing process comprising carrying out the multi-step polishing under preset conditions and measurement of the surface of the workpiece before and after each polishing step; and a second polishing process comprising carrying out a predetermined step of the multi-step polishing under polishing conditions which have been modified based on the results of the measurement.
Public/Granted literature
- US20070049166A1 Polishing method and polishing apparatus Public/Granted day:2007-03-01
Information query
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