Invention Grant
US07989345B2 Methods of forming blind wafer interconnects, and related structures and assemblies
有权
形成盲晶片互连的方法以及相关的结构和组件
- Patent Title: Methods of forming blind wafer interconnects, and related structures and assemblies
- Patent Title (中): 形成盲晶片互连的方法以及相关的结构和组件
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Application No.: US11776137Application Date: 2007-07-11
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Publication No.: US07989345B2Publication Date: 2011-08-02
- Inventor: Salman Akram , Sidney B. Rigg
- Applicant: Salman Akram , Sidney B. Rigg
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L21/4763
- IPC: H01L21/4763

Abstract:
Methods for forming blind wafer interconnects (BWIs) from the back side surface of a substrate structure to the underside of a bond pad on the opposing surface includes the formation of a blind hole from the back side surface, forming a passivating layer therein, removing passivation material from the blind hole bottom, depositing at least one conductive layer within the blind hole, and filling the blind hole with solder or other conductive material or a dielectric material.
Public/Granted literature
- US20070257373A1 METHODS OF FORMING BLIND WAFER INTERCONNECTS, AND RELATED STRUCTURES AND ASSEMBLIES Public/Granted day:2007-11-08
Information query
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