Invention Grant
- Patent Title: Implementing vertical airgap structures between chip metal layers
- Patent Title (中): 在芯片金属层之间实现垂直气隙结构
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Application No.: US12430300Application Date: 2009-04-27
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Publication No.: US07989337B2Publication Date: 2011-08-02
- Inventor: Axel Aguado Granados , Benjamin Aaron Fox , Nathaniel James Gibbs , Andrew Benson Maki , Trevor Joseph Timpane
- Applicant: Axel Aguado Granados , Benjamin Aaron Fox , Nathaniel James Gibbs , Andrew Benson Maki , Trevor Joseph Timpane
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Joan Pennington
- Main IPC: H01L21/4763
- IPC: H01L21/4763

Abstract:
A method and structure are provided for implementing vertical airgap structures between chip metal layers. A first metal layer is formed. A first layer of silicon dioxide dielectric is deposited onto the first metal layer. A vertical air gap is etched from the first layer of silicon dioxide dielectric above the first metal layer. A second layer of silicon dioxide dielectric is deposited and the vertical air gap is sealed. A next trace layer is etched from the second layer of silicon dioxide dielectric and a via opening is etched from the second and first layers of silicon dioxide dielectric. Then metal is deposited into the next trace layer and metal is deposited into the via opening.
Public/Granted literature
- US20100270682A1 Implementing Vertical Airgap Structures Between Chip Metal Layers Public/Granted day:2010-10-28
Information query
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