Invention Grant
- Patent Title: Method for fabricating pixel cell of CMOS image sensor
- Patent Title (中): CMOS图像传感器像素单元的制作方法
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Application No.: US11871121Application Date: 2007-10-11
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Publication No.: US07989252B2Publication Date: 2011-08-02
- Inventor: Jianping Yang , Jieguang Huo
- Applicant: Jianping Yang , Jieguang Huo
- Applicant Address: CN Shanghai
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee Address: CN Shanghai
- Agency: Squire, Sanders & Dempsey (US) LLP
- Priority: CN200610147318 20061215
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/8234

Abstract:
The present invention provides a method for fabricating a pixel cell of CMOS image sensor, comprising: preparing a semiconductor substrate divided into region I and region II; forming an insulation layer on the surface of the semiconductor substrate in the region I and a gate dielectric layer on the surface of the semiconductor substrate in the region II; forming a poly-silicon gate on the surface of the semiconductor substrate in the region II; forming a deep doped well in the region I through an ion implantation with high energy; performing an ion implantation with low energy in the region I and an ion implantation for lightly doped source/drain in the region II simultaneously; and forming source/drain regions in the semiconductor substrate in the region II.
Public/Granted literature
- US20080145963A1 METHOD FOR FABRICATING PIXEL CELL OF CMOS IMAGE SENSOR Public/Granted day:2008-06-19
Information query
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