Invention Grant
- Patent Title: Method of manufacturing nitride-based semiconductor light-emitting device
- Patent Title (中): 制造氮化物系半导体发光元件的方法
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Application No.: US11802482Application Date: 2007-05-23
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Publication No.: US07989244B2Publication Date: 2011-08-02
- Inventor: Kyoung-kook Kim , Kwang-ki Choi , June-o Song , Suk-ho Yoon , Kwang-hyeon Baik , Hyun-soo Kim
- Applicant: Kyoung-kook Kim , Kwang-ki Choi , June-o Song , Suk-ho Yoon , Kwang-hyeon Baik , Hyun-soo Kim
- Applicant Address: KR Gyunggi-do
- Assignee: Samsung LED Co., Ltd.
- Current Assignee: Samsung LED Co., Ltd.
- Current Assignee Address: KR Gyunggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2006-0076368 20060811
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Provided is a method of manufacturing a nitride-based semiconductor light-emitting device having increased efficiency and increased output properties. The method may include forming a sacrificial layer having a wet etching property on a substrate, forming a protective layer on the sacrificial layer, protecting the sacrificial layer in a reaction gas atmosphere for crystal growth, and facilitating epitaxial growth of a semiconductor layer to be formed on the protective layer, forming a semiconductor device including an n-type semiconductor layer, an active layer, and a p-type semiconductor layer on the protective layer, and removing the substrate from the semiconductor device by wet etching the sacrificial layer.
Public/Granted literature
- US20080038857A1 Method of manufacturing nitride-based semiconductor light-emitting device Public/Granted day:2008-02-14
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