Invention Grant
- Patent Title: Manufacturing method of optical waveguide
- Patent Title (中): 光波导的制造方法
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Application No.: US12133629Application Date: 2008-06-05
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Publication No.: US07989150B2Publication Date: 2011-08-02
- Inventor: Sazzadur Rahman Khan
- Applicant: Sazzadur Rahman Khan
- Applicant Address: JP Ibaraki-Shi, Osaka
- Assignee: Nitto Denko Corporation
- Current Assignee: Nitto Denko Corporation
- Current Assignee Address: JP Ibaraki-Shi, Osaka
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2007-151718 20070607; JP2008-125844 20080513
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
An optical waveguide production method for producing an optical waveguide comprising the steps of: forming an under-cladding layer and an alignment mark from the same material on a substrate; forming a thin metal film on the alignment mark; forming a first transparent photosensitive resin layer on the resultant substrate to cover the under-cladding layer and the thin metal film; positioning an exposure mask with reference to the thin metal film formed on the alignment mark; and selectively exposing a predetermined portion of the first photosensitive resin layer on the under-cladding layer via the exposure mask to form a core defined by the exposed portion of the first photosensitive resin layer.
Public/Granted literature
- US20080305439A1 MANUFACTURING METHOD OF OPTICAL WAVEGUIDE Public/Granted day:2008-12-11
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