Invention Grant
- Patent Title: Component fabrication using thermal resist materials
- Patent Title (中): 使用耐热材料的部件制造
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Application No.: US11869008Application Date: 2007-10-09
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Publication No.: US07989146B2Publication Date: 2011-08-02
- Inventor: Mitchell S. Burberry , Lee W. Tutt
- Applicant: Mitchell S. Burberry , Lee W. Tutt
- Applicant Address: US NY Rochester
- Assignee: Eastman Kodak Company
- Current Assignee: Eastman Kodak Company
- Current Assignee Address: US NY Rochester
- Agent Nelson Adrian Bush
- Main IPC: G03F7/26
- IPC: G03F7/26

Abstract:
A method for producing a patterned material for electronic or photonic circuits, comprising the steps of: p) providing a substrate; q) coating the substrate with a polymer layer; r) coating a thermal resist solution over the polymer layer to form a thermal resist layer, wherein the polymer layer is substantially immiscible in the thermal resist solution; s) exposing predetermined areas of the thermal resist layer, corresponding to a desired image pattern, using infrared light; t) removing portions of the thermal resist layer corresponding to a desired image pattern, using a developer; u) removing the polymer layer where the thermal resist layer has been previously removed and undercutting a portion of the remaining thermal resist layer by an etching process; v) depositing a material using a substantially anisotropic process; and removing the remaining thermal resist layer and any overlying material with a solvent for the polymer or thermal resist layers leaving the material in a desired pattern.
Public/Granted literature
- US20090092928A1 COMPONENT FABRICATION USING THERMAL RESIST MATERIALS Public/Granted day:2009-04-09
Information query
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