Invention Grant
US07989056B2 Hydrophobic surface coating with low wetting hysteresis, method for depositing same, microcomponent and use 有权
疏水性表面涂层具有低润湿滞后性,沉积方法,微量元件和使用

Hydrophobic surface coating with low wetting hysteresis, method for depositing same, microcomponent and use
Abstract:
A hydrophobic surface coating, preferably obtained by chemical vapor deposition, comprises at least an upper thin layer formed by a compound selected from the group consisting of SiCxOy:H with x comprised between 1.4 and 2 and y comprised between 0.8 and 1.4 and SiCx′Ny′:H with x′ comprised between 1.2 and 1.4 and y′ comprised between 0.6 and 0.8, so as to obtain a free surface with a low wetting hysteresis. Such a hydrophobic surface coating can be arranged on the free surface of a microcomponent comprising at least one substrate provided with, an electrode array and particularly suitable for moving drops of liquid by electrowetting on dielectric.
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