Invention Grant
US07988817B2 Lift pin driving device and a flat panel display manufacturing apparatus having same
有权
升降销驱动装置和具有该升降销驱动装置的平板显示器制造装置
- Patent Title: Lift pin driving device and a flat panel display manufacturing apparatus having same
- Patent Title (中): 升降销驱动装置和具有该升降销驱动装置的平板显示器制造装置
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Application No.: US11874272Application Date: 2007-10-18
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Publication No.: US07988817B2Publication Date: 2011-08-02
- Inventor: Hyoung Kyu Son
- Applicant: Hyoung Kyu Son
- Applicant Address: KR Seongnam-si
- Assignee: ADP Engineering Co., Ltd.
- Current Assignee: ADP Engineering Co., Ltd.
- Current Assignee Address: KR Seongnam-si
- Agency: KED & Associates, LLP
- Priority: KR10-2006-0111227 20061110; KR10-2006-0111241 20061110
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F1/00 ; H01L21/306
Abstract:
A lift pin driving device and a flat panel display (FPD) manufacturing apparatus having the device are provided. The lift pin driving device can precisely move a plurality of lift pins using one motor, thus realizing a simple lift pin driving structure and a simple motor control structure. This allows a space below a chamber body of the manufacturing apparatus to be configured in a variety of ways, thus reducing the cost of equipment and the production cost of products.
Public/Granted literature
- US20080110397A1 LIFT PIN DRIVING DEVICE AND A FLAT PANEL DISPLAY MANUFACTURING APPARATUS HAVING SAME Public/Granted day:2008-05-15
Information query
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