Invention Grant
- Patent Title: Device comprising a piezoelectric resonator element, method for producing the same and method for outputting a signal depending on a resonant frequency
- Patent Title (中): 包括压电谐振元件的装置，其制造方法以及根据谐振频率输出信号的方法
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Application No.: US12066084Application Date: 2006-09-07
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Publication No.: US07988351B2Publication Date: 2011-08-02
- Inventor: Reinhard Gabl , Matthias Schreiter
- Applicant: Reinhard Gabl , Matthias Schreiter
- Applicant Address: DE Munich
- Assignee: Siemens Aktiengesellschaft
- Current Assignee: Siemens Aktiengesellschaft
- Current Assignee Address: DE Munich
- Agency: Young & Thompson
- Priority: DE102005043037 20050909
- International Application: PCT/EP2006/066127 WO 20060907
- International Announcement: WO2007/028817 WO 20070315
- Main IPC: G01K11/26
- IPC: G01K11/26
Abstract:
The invention relates to a device (31) which comprises at least one piezoacoustic resonator element (2) having a piezoelectric layer (32) and two electrodes that are electrically contacted to the piezoelectric layer (32). The piezoacoustic resonator element (2) is configured in such a manner that, when a voltage is applied to the piezoelectric layer (32), a thickness oscillation of the piezoelectric layer (32) is excited via the electrodes with a resonant frequency. The inventive device is characterized by comprising, integrated into the piezoacoustic resonator element (2), a temperature measurement device (3) having a measuring element (37) that is configured as a thin layer.
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