Invention Grant
- Patent Title: Corner cube member illumination device and inspection system having the same
- Patent Title (中): 角立方会员照明装置及其检查系统
-
Application No.: US11863649Application Date: 2007-09-28
-
Publication No.: US07988309B2Publication Date: 2011-08-02
- Inventor: Kenji Saitoh , Hiroshi Yoshikawa
- Applicant: Kenji Saitoh , Hiroshi Yoshikawa
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2006-270652 20061002
- Main IPC: G03B15/02
- IPC: G03B15/02 ; G03B15/06 ; F21V7/05
Abstract:
An illumination device has a light source that supplies illumination light to an object to be illuminated and also has a corner cube member disposed at the opposite side of the light source with respect to the object to be illuminated. With this feature, efficient illumination of the object to be illuminated is achieved without need for high precision in positioning.
Public/Granted literature
- US20080080161A1 ILLUMINATION DEVICE AND INSPECTION SYSTEM HAVING SAME Public/Granted day:2008-04-03
Information query
