Invention Grant
US07988293B2 Method of qualifying light spots for optical measurements and measurement instrument employing method of qualifying light spots 有权
光学测量光斑鉴定方法和采用光斑鉴定方法的测量仪器

Method of qualifying light spots for optical measurements and measurement instrument employing method of qualifying light spots
Abstract:
A method of determining a wavefront of a received light beam includes: (a) receiving a light beam; (b) producing a group of light spots from the light beam; (c) qualifying a set of the light spots for use in determining a wavefront of the received light beam; and (d) determining the wavefront of the received light beam using the qualified set of light spots. Qualifying the set of light spots includes, for each light spot: calculating a first calculated location of the light spot using a first calculation algorithm; calculating a second calculated location of the light spot using a second calculation algorithm; and when a difference between the first and second calculated locations for the light spot is greater than an agreement threshold, excluding the light spot from the set of light spots and/or from being employed in determining the wavefront of the received light beam.
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