Invention Grant
- Patent Title: Protective tape joining apparatus
- Patent Title (中): 保护带接合装置
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Application No.: US12429419Application Date: 2009-04-24
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Publication No.: US07987886B2Publication Date: 2011-08-02
- Inventor: Masayuki Yamamoto , Yasuji Kaneshima
- Applicant: Masayuki Yamamoto , Yasuji Kaneshima
- Applicant Address: JP Osaka
- Assignee: Nitto Denko Corporation
- Current Assignee: Nitto Denko Corporation
- Current Assignee Address: JP Osaka
- Agency: Cheng Law Group, PLLC
- Priority: JP2008-120574 20080502
- Main IPC: B32B43/00
- IPC: B32B43/00

Abstract:
A chuck table is configured with a table main body having a wafer placement part holding a wafer placed thereon, and an annular tape support frame provided outside the wafer placement part with a cutter blade traveling groove being interposed therebetween. The tape support frame has, at a top face thereof, a plurality of linear grooves arranged in parallel in a tape joining direction, a large number of linear tape support parts each located between the linear grooves, and an annular tape support part supporting the protective tape at an outer side of the cutter blade traveling groove.
Public/Granted literature
- US20090272496A1 PROTECTIVE TAPE JOINING APPARATUS Public/Granted day:2009-11-05
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