Invention Grant
US07987714B2 Disc resonator gyroscope with improved frequency coincidence and method of manufacture 有权
具有改进的频率重合的光盘谐振器陀螺仪和制造方法

Disc resonator gyroscope with improved frequency coincidence and method of manufacture
Abstract:
A disc resonator gyroscope (DRG) and method of manufacture. The DRG has a surrounding pattern of bond metal having a symmetry related to the symmetry of a resonator device wafer that enables more even dissipation of heat from a resonator device wafer of the DRG during an etching operation. The metal bond frame eliminates or substantially reduces the thermal asymmetry that the resonator device wafer normally experiences when a conventional, square bond frame is used, which in turn can cause geometric asymmetry in the widths of the beams that are etched into the resonator device wafer of the DRG.
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