Invention Grant
US07987714B2 Disc resonator gyroscope with improved frequency coincidence and method of manufacture
有权
具有改进的频率重合的光盘谐振器陀螺仪和制造方法
- Patent Title: Disc resonator gyroscope with improved frequency coincidence and method of manufacture
- Patent Title (中): 具有改进的频率重合的光盘谐振器陀螺仪和制造方法
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Application No.: US11871502Application Date: 2007-10-12
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Publication No.: US07987714B2Publication Date: 2011-08-02
- Inventor: Jeffrey F. DeNatale , Philip A. Stupar
- Applicant: Jeffrey F. DeNatale , Philip A. Stupar
- Applicant Address: US IL Chicago
- Assignee: The Boeing Company
- Current Assignee: The Boeing Company
- Current Assignee Address: US IL Chicago
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: G01C19/00
- IPC: G01C19/00

Abstract:
A disc resonator gyroscope (DRG) and method of manufacture. The DRG has a surrounding pattern of bond metal having a symmetry related to the symmetry of a resonator device wafer that enables more even dissipation of heat from a resonator device wafer of the DRG during an etching operation. The metal bond frame eliminates or substantially reduces the thermal asymmetry that the resonator device wafer normally experiences when a conventional, square bond frame is used, which in turn can cause geometric asymmetry in the widths of the beams that are etched into the resonator device wafer of the DRG.
Public/Granted literature
- US20090095077A1 DISC RESONATOR GYROSCOPE WITH IMPROVED FREQUENCY COINCIDENCE AND METHOD OF MANUFACTURE Public/Granted day:2009-04-16
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