Invention Grant
- Patent Title: Optical displacement detection mechanism and surface information measurement device using the same
- Patent Title (中): 光学位移检测机构和表面信息测量装置使用相同
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Application No.: US11841445Application Date: 2007-08-20
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Publication No.: US07973942B2Publication Date: 2011-07-05
- Inventor: Masato Iyoki , Hiroyoshi Yamamoto , Kazutoshi Watanabe , Masatsugu Shigeno
- Applicant: Masato Iyoki , Hiroyoshi Yamamoto , Kazutoshi Watanabe , Masatsugu Shigeno
- Applicant Address: JP
- Assignee: SII Nano Technology Inc.
- Current Assignee: SII Nano Technology Inc.
- Current Assignee Address: JP
- Agency: Brinks Hofer Gilson & Lione
- Priority: JP2006-225731 20060822
- Main IPC: G01B11/14
- IPC: G01B11/14 ; G01B11/30 ; G01N21/55 ; G01N23/00 ; G01N21/86 ; G21K7/00 ; G01V8/00 ; G01Q20/02

Abstract:
There is provided an optical displacement detection mechanism in which, even if a measurement object changes, a detection sensitivity and a ratio of a noise are adjustable without depending on optical characteristics such as reflectivity, or a shape and mechanical characteristics of a measurement object, an influence of a thermal deformation of the measurement object by an irradiated light to the measurement object can be made small, and a measurement accuracy can be ensured under optimum conditions. In an optical displacement detection mechanism comprising a light source irradiating a light to a cantilever becoming the measurement object, a light source drive circuit driving the light source, a photodetector receiving the light after irradiated to the cantilever from the light source to thereby detect an intensity of the light, and an amplifier amplifying a detection signal of the photodetector at a predetermined amplification rate, there is made such that, by providing a light intensity regulator and an amplification rate regulator, an irradiated light intensity to the cantilever and an amplification rate of the photodetector can be made variable.
Public/Granted literature
- US20080049236A1 Optical Displacement Detection Mechanism and Surface Information Measurement Device Using the Same Public/Granted day:2008-02-28
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