Invention Grant
- Patent Title: Time resolved radiation assisted device alteration
- Patent Title (中): 时间分辨放射辅助装置改造
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Application No.: US12107398Application Date: 2008-04-22
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Publication No.: US07973545B2Publication Date: 2011-07-05
- Inventor: Kent B. Erington , John E. Asquith
- Applicant: Kent B. Erington , John E. Asquith
- Applicant Address: US TX Austin
- Assignee: Freescale Semiconductor, Inc.
- Current Assignee: Freescale Semiconductor, Inc.
- Current Assignee Address: US TX Austin
- Agent Gary R. Stanford
- Main IPC: G01R31/307
- IPC: G01R31/307 ; G01R31/3183

Abstract:
A method of time resolved radiation assisted device alteration testing of a semiconductor circuit which includes performing spatially resolved radiation assisted circuit testing on the semiconductor circuit while applying a test pattern to determine a pass-fail modulation location, asynchronously scanning the semiconductor circuit with radiation while repeatedly applying the test pattern and providing pass-fail results, combining corresponding pass-fail results provided during the asynchronously scanning to determine a shifted pass-fail modulation indication, determining time shift information between the pass-fail modulation location and the shifted pass-fail modulation indication, and identifying at least one of the test vectors based on the time shift information. The radiation may be a continuous wave laser beam. The time shift information may be determined by scanning an image, incorporating graphics into the image indicating the pass-fail modulation location and the shifted pass-fail modulation indication, and measuring a pixel shift on the scanned image.
Public/Granted literature
- US20090261840A1 TIME RESOLVED RADIATION ASSISTED DEVICE ALTERATION Public/Granted day:2009-10-22
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