Invention Grant
US07973392B2 Electronic device and method for manufacturing structure for electronic device 有权
电子设备制造结构的电子设备及方法

  • Patent Title: Electronic device and method for manufacturing structure for electronic device
  • Patent Title (中): 电子设备制造结构的电子设备及方法
  • Application No.: US12501537
    Application Date: 2009-07-13
  • Publication No.: US07973392B2
    Publication Date: 2011-07-05
  • Inventor: Hideo Ol
  • Applicant: Hideo Ol
  • Applicant Address: US TX Austin
  • Assignee: Freescale Semiconductor, Inc.
  • Current Assignee: Freescale Semiconductor, Inc.
  • Current Assignee Address: US TX Austin
  • Agent Charles Bergere
  • Priority: JP2008-231411 20080909
  • Main IPC: H01L23/552
  • IPC: H01L23/552 H01L21/302
Electronic device and method for manufacturing structure for electronic device
Abstract:
An electronic device including a shielded electronic element, and a method for manufacturing a shielding structure. An oxide film is formed on the surface of a silicon substrate having a [100] face. Part of the oxide film is removed to form a first window region. Silicon substrates are joined together to form an SOI substrate, which includes a buried mask having a second window region. Substrate thinning is then performed, and oxide films are formed on the two surfaces of the SOI substrate so that the first window region has a large area and includes the region above the buried second window region. Then, anisotropic etching is performed to form a cap that includes a step. Wire bonding for shielding is performed on the step.
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