Invention Grant
- Patent Title: Electronic device and method for manufacturing structure for electronic device
- Patent Title (中): 电子设备制造结构的电子设备及方法
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Application No.: US12501537Application Date: 2009-07-13
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Publication No.: US07973392B2Publication Date: 2011-07-05
- Inventor: Hideo Ol
- Applicant: Hideo Ol
- Applicant Address: US TX Austin
- Assignee: Freescale Semiconductor, Inc.
- Current Assignee: Freescale Semiconductor, Inc.
- Current Assignee Address: US TX Austin
- Agent Charles Bergere
- Priority: JP2008-231411 20080909
- Main IPC: H01L23/552
- IPC: H01L23/552 ; H01L21/302

Abstract:
An electronic device including a shielded electronic element, and a method for manufacturing a shielding structure. An oxide film is formed on the surface of a silicon substrate having a [100] face. Part of the oxide film is removed to form a first window region. Silicon substrates are joined together to form an SOI substrate, which includes a buried mask having a second window region. Substrate thinning is then performed, and oxide films are formed on the two surfaces of the SOI substrate so that the first window region has a large area and includes the region above the buried second window region. Then, anisotropic etching is performed to form a cap that includes a step. Wire bonding for shielding is performed on the step.
Public/Granted literature
- US20100059868A1 ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING STRUCTURE FOR ELECTRONIC DEVICE Public/Granted day:2010-03-11
Information query
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