Invention Grant
- Patent Title: Semiconductor device with T-gate electrode
- Patent Title (中): 具有T型栅电极的半导体器件
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Application No.: US12122982Application Date: 2008-05-19
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Publication No.: US07973368B2Publication Date: 2011-07-05
- Inventor: Jong Won Lim , Ho Kyun Ahn , Hong Gu Ji , Woo Jin Chang , Jae Kyoung Mun , Hae Cheon Kim , Hyun Kyu Yu
- Applicant: Jong Won Lim , Ho Kyun Ahn , Hong Gu Ji , Woo Jin Chang , Jae Kyoung Mun , Hae Cheon Kim , Hyun Kyu Yu
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2007-0125466 20071205
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113 ; H01L31/119

Abstract:
Provided are a semiconductor device with a T-gate electrode capable of improving stability and a high frequency characteristic of the semiconductor device by reducing source resistance, parasitic capacitance, and gate resistance and a method of fabricating the same. In the semiconductor device, in order to form source and drain electrodes and the T-gate electrode on a substrate, first and second protective layers constructed with silicon oxide layers or silicon nitride layers are formed on sides of a supporting part under a head part of the T-gate electrode, and the second protective layer constructed with a silicon oxide layer or silicon nitride layer is formed on sides of the source and drain electrodes. Accordingly, it is possible to protect an activated region of the semiconductor device and reduce gate-drain parasitic capacitance and gate-source parasitic capacitance.
Public/Granted literature
- US20090146184A1 SEMICONDUCTOR DEVICE WITH T-GATE ELECTRODE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2009-06-11
Information query
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