Invention Grant
US07972926B2 Methods of forming memory cells; and methods of forming vertical structures
有权
形成记忆细胞的方法 以及形成垂直结构的方法
- Patent Title: Methods of forming memory cells; and methods of forming vertical structures
- Patent Title (中): 形成记忆细胞的方法 以及形成垂直结构的方法
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Application No.: US12497128Application Date: 2009-07-02
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Publication No.: US07972926B2Publication Date: 2011-07-05
- Inventor: David A. Kewley , Brian Cleereman , Stephen W. Russell , Rex Stone , Anthony C. Krauth
- Applicant: David A. Kewley , Brian Cleereman , Stephen W. Russell , Rex Stone , Anthony C. Krauth
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Some embodiments include methods of forming memory. A series of photoresist features may be formed over a gate stack, and a placeholder may be formed at an end of said series. The placeholder may be spaced from the end of said series by a gap. A layer may be formed over and between the photoresist features, over the placeholder, and within said gap. The layer may be anisotropically etched into a plurality of first vertical structures along edges of the photoresist features, and into a second vertical structure along an edge of the placeholder. A mask may be formed over the second vertical structure. Subsequently, the first vertical structures may be used to pattern string gates while the mask is used to pattern a select gate. Some embodiments include methods of forming conductive runners, and some embodiments may include semiconductor constructions.
Public/Granted literature
- US20110003469A1 Methods Of Forming Memory Cells; And Methods Of Forming Vertical Structures Public/Granted day:2011-01-06
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