Invention Grant
- Patent Title: Quartz window gas sensor with heated membrane
- Patent Title (中): 石英玻璃气体传感器加热膜
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Application No.: US12227770Application Date: 2007-05-04
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Publication No.: US07971471B2Publication Date: 2011-07-05
- Inventor: Werner Grosse Bley , Daniel Wetzig
- Applicant: Werner Grosse Bley , Daniel Wetzig
- Applicant Address: DE
- Assignee: Inficon GmbH
- Current Assignee: Inficon GmbH
- Current Assignee Address: DE
- Agency: Ohlandt, Greeley, Ruggiero & Perle, LLP
- Priority: DE102006026125 20060603
- International Application: PCT/EP2007/054335 WO 20070504
- International Announcement: WO2007/141098 WO 20071213
- Main IPC: G01M3/20
- IPC: G01M3/20 ; G01N1/22

Abstract:
The gas sensor has a selectively permeable membrane which is composed of silicon material and is provided with a heating device on the outside. The membrane closes an evacuated housing which contains a pressure sensor. When evacuating the area surrounding the housing, the heat dissipation is changed as a result of the quick change in the total pressure of the surrounding air, with the result that signal drift arises despite temperature regulation of the membrane. The disclosure provides at least one second heating device whose temperature is regulated independently of the first heating device. As a result, the membrane temperature is highly constant even in the case of severely changing total pressure in the housing.
Public/Granted literature
- US20090173141A1 Gas Sensor Public/Granted day:2009-07-09
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