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US07958463B2 Computer automated method for manufacturing an integrated circuit pattern layout 失效
用于制造集成电路图案布局的计算机自动化方法

Computer automated method for manufacturing an integrated circuit pattern layout
Abstract:
A computer automated method for designing an integrated circuit includes placing a plurality of marks on each of contours of a plurality of patterns allocated in a chip area; dividing the marks into a plurality of groups so that the adjacent marks are merged in a same group; determining one of the groups as a candidate hot spot based on a total number of marks included in each of the groups; and modifying the corresponding pattern in the candidate hot spot.
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