Invention Grant
US07957636B2 Illumination apparatus and appearance inspection apparatus including the same 有权
照明装置及其外观检查装置

Illumination apparatus and appearance inspection apparatus including the same
Abstract:
An illumination apparatus which illuminates a surface of an object having a three-dimensional shape includes a light source, a guide configured to guide light from the light source to a surface of the object, and a diffuser which has a diffusion-reflection surface that faces a light exit surface of the guide via the object, wherein the diffuser is arranged at such a position that the light which is emitted from the guide and is not directly incident on the object is incident on the diffusion-reflection surface while a part of the light reflected and diffused by the diffusion-reflection surface is incident on a surface of the object.
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