Invention Grant
- Patent Title: Projection optical system
- Patent Title (中): 投影光学系统
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Application No.: US11793678Application Date: 2005-12-30
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Publication No.: US07957069B2Publication Date: 2011-06-07
- Inventor: Aurelian Dodoc , Wilhelm Ulrich
- Applicant: Aurelian Dodoc , Wilhelm Ulrich
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- International Application: PCT/EP2005/014148 WO 20051230
- International Announcement: WO2006/069795 WO 20060706
- Main IPC: G02B3/00
- IPC: G02B3/00 ; G02B9/00 ; G02B9/34 ; G02B13/18 ; G02B3/02

Abstract:
A projection optical system comprises a plurality of lenses disposed along an optical axis of the projection optical system; wherein the plurality of lenses is dividable into four non-overlapping groups of lenses, such that a total refractive power of each group of lenses is one of a negative refractive power and a positive refractive power; and wherein a refractive power of each lens of the fourth group of lenses is equal to or greater than 0. A lens of the third group of lenses which is disposed directly adjacent to a lens of the fourth group of lenses may have a concave surface facing towards the second object.
Public/Granted literature
- US20070268594A1 Projection Optical System Public/Granted day:2007-11-22
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