Invention Grant
- Patent Title: Pattern generator
- Patent Title (中): 模式生成器
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Application No.: US12662675Application Date: 2010-04-28
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Publication No.: US07957055B2Publication Date: 2011-06-07
- Inventor: Torbjorn Sandstrom
- Applicant: Torbjorn Sandstrom
- Applicant Address: SE Taby
- Assignee: Micronic Mydata AB
- Current Assignee: Micronic Mydata AB
- Current Assignee Address: SE Taby
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: SE9800665 19980302
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B41J2/47

Abstract:
The present invention relates to an apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask a display panel or a microoptical device. The apparatus may include a source for emitting light flashes, a spatial modulator having modulating elements (pixels), adapted to being illuminated by the radiation, and a projection system creating an image of the modulator on the workpiece. It may further include an electronic data processing and delivery system receiving a digital description of the pattern to be written, converting the pattern to modulator signals, and feeding the signals to the modulator. An electronic control system may be provided to control a trigger signal to compensate for flash-to-flash time jitter in the light source.
Public/Granted literature
- US20100208327A1 Pattern generator Public/Granted day:2010-08-19
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