Invention Grant
US07956715B2 Thin film structures with negative inductance and methods for fabricating inductors comprising the same 有权
具有负电感的薄膜结构和用于制造包括该电感的电感器的方法

Thin film structures with negative inductance and methods for fabricating inductors comprising the same
Abstract:
An inductor structure comprising a substrate and a planar conductor structure on a surface of the substrate, and methods for fabricating an inductor structure. The planar conductor structure may comprise a vertical stack of three or more multilayer films. Each multilayer film may comprise a first layer of a first metal, defining a first vertical thickness, and a second layer of a second metal, defining a second vertical thickness. The metals and thicknesses are chosen such that the inductor exhibits a negative electrical self-inductance when an electrical signal is transmitted from a first contact point to a second contact point.
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