Invention Grant
- Patent Title: Sapphire substrates and methods of making same
- Patent Title (中): 蓝宝石基板及其制造方法
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Application No.: US11963369Application Date: 2007-12-21
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Publication No.: US07956356B2Publication Date: 2011-06-07
- Inventor: Brahmanandam V. Tanikella , Matthew A. Simpson , Palaniappan Chinnakaruppan , Robert A. Rizzuto , Isaac K. Cherian , Ramanujam Vedantham
- Applicant: Brahmanandam V. Tanikella , Matthew A. Simpson , Palaniappan Chinnakaruppan , Robert A. Rizzuto , Isaac K. Cherian , Ramanujam Vedantham
- Applicant Address: US MA Worcester
- Assignee: Saint-Gobain Ceramics & Plastics, Inc.
- Current Assignee: Saint-Gobain Ceramics & Plastics, Inc.
- Current Assignee Address: US MA Worcester
- Agency: Abel Law Group, LLP
- Main IPC: H01L29/10
- IPC: H01L29/10
Abstract:
A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 μm/cm2, wherein nTTV is total thickness variation normalized for surface area of the generally planar surface, the substrate having a diameter not less than about 9.0 cm.
Public/Granted literature
- US20080164578A1 SAPPHIRE SUBSTRATES AND METHODS OF MAKING SAME Public/Granted day:2008-07-10
Information query
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