Invention Grant
US07956286B2 Cable handling structure for linear axis, and substrate transfer device equipped with the same 有权
用于线轴的电缆处理结构,以及配备相同的基板传送装置

Cable handling structure for linear axis, and substrate transfer device equipped with the same
Abstract:
A cable handling structure for a linear axis includes a base member, a slide member capable of linearly sliding in parallel with the base member, and a cable guide configured to guide a cable extended from the base member to the slide member with the cable accommodated in the cable guide. The cable guide is curved into a U-shape with one end thereof fixed to the base member and the other end thereof fixed to the slide member, and disposed so as to extend in a moving direction of the slide member and incline with respect to the base member as seen from the moving direction of the slide member.
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