Invention Grant
- Patent Title: Process for manufacture of trench Schottky
- Patent Title (中): 沟槽肖特基的制造工艺
-
Application No.: US11715225Application Date: 2007-03-07
-
Publication No.: US07955961B2Publication Date: 2011-06-07
- Inventor: Giovanni Richieri
- Applicant: Giovanni Richieri
- Applicant Address: US CA El Segundo
- Assignee: International Rectifier Corporation
- Current Assignee: International Rectifier Corporation
- Current Assignee Address: US CA El Segundo
- Agency: Farjami & Farjami LLP
- Main IPC: H01L27/095
- IPC: H01L27/095 ; H01L29/47 ; H01L21/338

Abstract:
A trench-type Schottky semiconductor device and a method for fabricating the trench-type Schottky semiconductor device are disclosed. The method includes the steps of forming an epitaxial (EPI) layer atop a silicon substrate, forming a nitride layer atop the EPI layer, patterning a plurality of windows in the nitride layer into an active region and a termination region, forming a plurality of trenches in the active and termination regions such that the plurality of trenches in the termination regions are spaced apart from each other so as to form a plurality of mesas, lining the first type of trenches with a gate oxide layer, and converting the mesas to oxide mesas; and then applying a barrier layer metal to the mesas in the device active area and in the termination trenches.
Public/Granted literature
- US20070264809A1 Process for manufacture of trench schottky Public/Granted day:2007-11-15
Information query
IPC分类: