Invention Grant
US07955960B2 Nonvolatile memory device and method of fabricating the same 失效
非易失性存储器件及其制造方法

Nonvolatile memory device and method of fabricating the same
Abstract:
A nonvolatile memory device and a method of fabricating the same is provided to prevent charges stored in a charge trap layer from moving to neighboring memory cells. The method of fabricating a nonvolatile memory device, includes forming a first dielectric layer on a semiconductor substrate in which active regions are defined by isolation layers, forming a charge trap layer on the first dielectric layer, removing the first dielectric layer and the charge trap layer over the isolation layers, forming a second dielectric layer on the isolation layers including the charge trap layer, and forming a conductive layer on the second dielectric layer.
Public/Granted literature
Information query
Patent Agency Ranking
0/0