Invention Grant
- Patent Title: Nonvolatile memory device and method of fabricating the same
- Patent Title (中): 非易失性存储器件及其制造方法
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Application No.: US12052914Application Date: 2008-03-21
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Publication No.: US07955960B2Publication Date: 2011-06-07
- Inventor: Se Jun Kim , Eun Seok Choi , Kyoung Hwan Park , Hyun Seung Yoo , Myung Shik Lee , Young Ok Hong , Jung Ryul Ahn , Yong Top Kim , Kyung Pil Hwang , Won Sic Woo , Jae Young Park , Ki Hong Lee , Ki Seon Park , Moon Sig Joo
- Applicant: Se Jun Kim , Eun Seok Choi , Kyoung Hwan Park , Hyun Seung Yoo , Myung Shik Lee , Young Ok Hong , Jung Ryul Ahn , Yong Top Kim , Kyung Pil Hwang , Won Sic Woo , Jae Young Park , Ki Hong Lee , Ki Seon Park , Moon Sig Joo
- Applicant Address: KR Icheon-si, Kyounki-do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon-si, Kyounki-do
- Agency: Lowe Hauptman Ham & Berner LLP
- Priority: KR10-2007-0028001 20070322; KR10-2007-0042979 20070503; KR10-2007-0063605 20070627; KR10-2007-0091555 20070910
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A nonvolatile memory device and a method of fabricating the same is provided to prevent charges stored in a charge trap layer from moving to neighboring memory cells. The method of fabricating a nonvolatile memory device, includes forming a first dielectric layer on a semiconductor substrate in which active regions are defined by isolation layers, forming a charge trap layer on the first dielectric layer, removing the first dielectric layer and the charge trap layer over the isolation layers, forming a second dielectric layer on the isolation layers including the charge trap layer, and forming a conductive layer on the second dielectric layer.
Public/Granted literature
- US20080230830A1 NONVOLATILE MEMORY DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2008-09-25
Information query
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