Invention Grant
- Patent Title: Method for manufacturing GaN-based film LED
- Patent Title (中): GaN基薄膜LED的制造方法
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Application No.: US12889101Application Date: 2010-09-23
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Publication No.: US07955959B2Publication Date: 2011-06-07
- Inventor: Jyh Chiarng Wu , Xuejiao Lin , Qunfeng Pan , Meng Hsin Yeh , Huijun Huang
- Applicant: Jyh Chiarng Wu , Xuejiao Lin , Qunfeng Pan , Meng Hsin Yeh , Huijun Huang
- Applicant Address: CN Xiamen
- Assignee: Xiamen Sanan Optoelectronics Technology Co., Ltd.
- Current Assignee: Xiamen Sanan Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Xiamen
- Agency: Fulbright & Jaworski
- Priority: CN200910019198 20090925
- Main IPC: H01L21/205
- IPC: H01L21/205 ; H01L21/301 ; H01L21/302

Abstract:
A method for manufacturing GaN-based film LED based on masklessly transferring photonic crystal structure is disclosed. Two dimensional photonic crystals are formed on a sapphire substrate. Lattice quality of GaN-based epitaxy on the sapphire substrate is improved, and the internal quantum efficiency of GaN-based LED epitaxy is increased. After the GaN-based film is transferred onto heat sink substrate, the two dimensional photonic crystals structure is masklessly transferred onto the light exiting surface of the GaN-based film by using different etching rates between the GaN material and the SiO2 mask, so that light extraction efficiency of the GaN-based LED is improved. That is, the GaN-based film LED according to the invention has a relatively high illumination efficiency and heat sink.
Public/Granted literature
- US20110076791A1 METHOD FOR MANUFACTURING GaN-BASED FILM LED Public/Granted day:2011-03-31
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