Invention Grant
US07955946B2 Methods of determining x-y spatial orientation of a semiconductor substrate comprising an integrated circuit, methods of positioning a semiconductor substrate comprising an integrated circuit, methods of processing a semiconductor substrate, and semiconductor devices
有权
确定包括集成电路的半导体衬底的x-y空间取向的方法,包括集成电路的半导体衬底的定位方法,半导体衬底的处理方法以及半导体器件
- Patent Title: Methods of determining x-y spatial orientation of a semiconductor substrate comprising an integrated circuit, methods of positioning a semiconductor substrate comprising an integrated circuit, methods of processing a semiconductor substrate, and semiconductor devices
- Patent Title (中): 确定包括集成电路的半导体衬底的x-y空间取向的方法,包括集成电路的半导体衬底的定位方法,半导体衬底的处理方法以及半导体器件
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Application No.: US11439078Application Date: 2006-05-22
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Publication No.: US07955946B2Publication Date: 2011-06-07
- Inventor: Dave Pratt , Kyle Kirby , Steve Oliver , Mark Hiatt
- Applicant: Dave Pratt , Kyle Kirby , Steve Oliver , Mark Hiatt
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John, P.S.
- Main IPC: H01L21/76
- IPC: H01L21/76

Abstract:
The invention includes methods of determining x-y spatial orientation of a semiconductor substrate comprising an integrated circuit, methods of positioning a semiconductor substrate comprising an integrated circuit, methods of processing a semiconductor substrate, and semiconductor devices. In one implementation, a method of determining x-y spatial orientation of a semiconductor substrate comprising an integrated circuit includes providing a semiconductor substrate comprising at least one integrated circuit die. The semiconductor substrate comprises a circuit side, a backside, and a plurality of conductive vias extending from the circuit side to the backside. The plurality of conductive vias on the semiconductor substrate backside is examined to determine location of portions of at least two of the plurality of conductive vias on the semiconductor substrate backside. From the determined location, x-y spatial orientation of the semiconductor substrate is determined. Other aspects and implementations are contemplated.
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