Invention Grant
- Patent Title: Method and apparatus for fabricating a carbon nanotube transistor
- Patent Title (中): 用于制造碳纳米管晶体管的方法和装置
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Application No.: US12727753Application Date: 2010-03-19
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Publication No.: US07955931B2Publication Date: 2011-06-07
- Inventor: Joerg Appenzeller , Phaedon Avouris , Yu-Ming Lin
- Applicant: Joerg Appenzeller , Phaedon Avouris , Yu-Ming Lin
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Main IPC: H01L21/8236
- IPC: H01L21/8236 ; H01L21/336

Abstract:
A method of fabricating a nanotube field-effect transistor having unipolar characteristics and a small inverse sub-threshold slope includes forming a local gate electrode beneath the nanotube between drain and source electrodes of the transistor and doping portions of the nanotube. In a further embodiment, the method includes forming at least one trench in the gate dielectric (e.g., a back gate dielectric) and back gate adjacent to the local gate electrode. Another aspect of the invention is a nanotube field-effect transistor fabricated using such a method.
Public/Granted literature
- US20100173462A1 METHOD AND APPARATUS FOR FABRICATING A CARBON NANOTUBE TRANSISTOR Public/Granted day:2010-07-08
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