Invention Grant
- Patent Title: Polishing fluid composition
- Patent Title (中): 抛光液组成
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Application No.: US12415548Application Date: 2009-03-31
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Publication No.: US07955517B2Publication Date: 2011-06-07
- Inventor: Shigeo Fujii , Yoshiaki Oshima , Koichi Naito
- Applicant: Shigeo Fujii , Yoshiaki Oshima , Koichi Naito
- Applicant Address: JP Tokyo
- Assignee: Kao Corporation
- Current Assignee: Kao Corporation
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2000-219605 20000719
- Main IPC: C03C15/00
- IPC: C03C15/00 ; B44C1/22 ; H01L21/302

Abstract:
To provide a polishing composition capable of increasing polishing rate and reducing surface roughness, without causing surface defects on a surface of an object to be polished; and a polishing process for a substrate to be polished. [1] a polishing composition comprising water, an abrasive, an intermediate alumina, and a polycarboxylic acid having 4 or more carbon atoms with no OH groups or a salt thereof, wherein a content of the intermediate alumina is from 1 to 90 parts by weight, based on 100 parts by weight of the abrasive; and [2] a polishing process for a substrate to be polished, comprising polishing a substrate to be polished under conditions that a composition of a polishing liquid during polishing is the composition as defined in item [1] above.
Public/Granted literature
- US20090197415A1 POLISHING FLUID COMPOSITION Public/Granted day:2009-08-06
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