Invention Grant
- Patent Title: Reaction force cancel system
- Patent Title (中): 反作用力取消系统
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Application No.: US12219846Application Date: 2008-07-29
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Publication No.: US07948198B2Publication Date: 2011-05-24
- Inventor: Takuya Hosobata
- Applicant: Takuya Hosobata
- Applicant Address: JP Tokyo
- Assignee: Sumitomo Heavy Industries, Ltd.
- Current Assignee: Sumitomo Heavy Industries, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Squire, Sanders & Dempsey (US) LLP
- Priority: JPP2007-197912 20070730
- Main IPC: H02K41/00
- IPC: H02K41/00

Abstract:
Increasing in size of a reaction force cancel system is suppressed. The reaction force cancel system is provided in a stage device including: a surface plate having a plurality of plate surfaces with different heights from each other, and installed on a floor via a vibration-isolating spring; and stages disposed on the plate surfaces respectively, and moving on the plate surfaces, and cancels reaction forces generated on the surface plate upon movements of the stages. In addition, the reaction force cancel system includes a first and a second reaction force canceling actuator that apply counter-thrusts to the surface plate, and a control section that controls the magnitudes of the counter-thrusts. In the reaction force cancel system, the heights of action points of counter-thrusts in the surface plate are different from each other, and the control section controls the counter-thrusts so as to counterbalance the reaction forces as resultant forces and resultant moments.
Public/Granted literature
- US20090278411A1 Reaction force cancel system Public/Granted day:2009-11-12
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