Invention Grant
US07948028B2 DRAM device having a gate dielectric layer with multiple thicknesses 有权
DRAM器件具有多个厚度的栅介电层

  • Patent Title: DRAM device having a gate dielectric layer with multiple thicknesses
  • Patent Title (中): DRAM器件具有多个厚度的栅介电层
  • Application No.: US12049385
    Application Date: 2008-03-17
  • Publication No.: US07948028B2
    Publication Date: 2011-05-24
  • Inventor: Shing-Hwa Renn
  • Applicant: Shing-Hwa Renn
  • Applicant Address: TW Kueishan, Tao-Yuan Hsien
  • Assignee: Nanya Technology Corp.
  • Current Assignee: Nanya Technology Corp.
  • Current Assignee Address: TW Kueishan, Tao-Yuan Hsien
  • Agent Winston Hsu; Scott Margo
  • Priority: TW96141857A 20071106
  • Main IPC: H01L29/66
  • IPC: H01L29/66
DRAM device having a gate dielectric layer with multiple thicknesses
Abstract:
A transistor device employed in a support circuit of a DRAM includes a semiconductor substrate having thereon a gate trench, a recessed gate embedded in the gate trench, a source doping region disposed at one side of the recessed gate, a drain doping region disposed at the other side of the recessed gate, and a gate dielectric layer between the recessed gate and the semiconductor substrate. The gate dielectric layer has at least two thicknesses that render the high-voltage transistor device asymmetric. The thicker gate dielectric layer is between the recessed gate and the drain doping region, while the thinner gate dielectric layer is between the recessed gate and the source doping region.
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