Invention Grant
- Patent Title: Forming of silicide areas in a semiconductor device
- Patent Title (中): 在半导体器件中形成硅化物区域
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Application No.: US11592398Application Date: 2006-11-02
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Publication No.: US07947583B2Publication Date: 2011-05-24
- Inventor: Delphine Aime , Benoît Froment
- Applicant: Delphine Aime , Benoît Froment
- Applicant Address: FR Montrouge
- Assignee: STMicroelectronics, SA
- Current Assignee: STMicroelectronics, SA
- Current Assignee Address: FR Montrouge
- Agency: Graybeal Jackson LLP
- Agent Lisa K. Jorgenson; Kevin D. Jablonski
- Priority: FR0553317 20051102
- Main IPC: H01L21/425
- IPC: H01L21/425

Abstract:
An embodiment of a method for forming silicide areas of different thicknesses in a device comprising first and second silicon areas, comprising the steps of: implanting antimony or aluminum in the upper portion of the first silicon areas; covering the silicon areas with a metallic material; and heating the device to transform all or part of the silicon areas into silicide areas, whereby the silicide areas formed at the level of the first silicon areas are thinner than the silicide areas formed at the level of the second silicon areas.
Public/Granted literature
- US20070099408A1 Forming of silicide areas in a semiconductor device Public/Granted day:2007-05-03
Information query
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