Invention Grant
US07947563B2 Chip ID applying method suitable for use in semiconductor integrated circuit 失效
适用于半导体集成电路的芯片ID应用方法

Chip ID applying method suitable for use in semiconductor integrated circuit
Abstract:
A chip forming position specifying method for applying chip IDs indicative of positions on a wafer where semiconductor chips are formed, and thereby specifying their positions. In the chip forming position specifying method, different marks are formed for every chip in a transfer mask (hereinafter called “mark forming mask”) used to form a wiring layer, in addition to normal functional wirings. The positions of the chips on the wafer are respectively specified according to combinations of the marks of a plurality of the mark forming masks, which have been transferred onto the wafer.
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