Invention Grant
- Patent Title: Method for inspecting the electrical performance of a flash memory cell
- Patent Title (中): 用于检查闪存单元的电性能的方法
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Application No.: US11927432Application Date: 2007-10-29
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Publication No.: US07940584B2Publication Date: 2011-05-10
- Inventor: Tae Kyu Kim , Jong Woo Kim , Xianghua Ye
- Applicant: Tae Kyu Kim , Jong Woo Kim , Xianghua Ye
- Applicant Address: CN Shanghai
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee Address: CN Shanghai
- Agency: Squire, Sanders & Dempsey (US) LLP
- Priority: CN200610119139 20061205
- Main IPC: G11C7/00
- IPC: G11C7/00

Abstract:
The present invention discloses a method for inspecting the electrical performance of a flash memory cell, which comprises: performing electron-storage programming on a flash memory cell for a pre-determined period; screening out flash memory cells that reach a specified reference value as a mother batch of flash memory cells that meet the preliminary requirement, by measuring the threshold voltage; then performing a second electron-storage programming on the flash memory cells screened out for a certain time period; baking these flash memory cells; and finally, measuring the threshold voltage of these baked flash memory cells again and determining whether the threshold voltage can still be maintained at or above the reference value, so that it can be determined ultimately whether the flash memory cells meet the electrical performance requirements.
Public/Granted literature
- US20080133984A1 Method for Inspecting the Electrical Performance of a Flash Memory Cell Public/Granted day:2008-06-05
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