Invention Grant
US07940514B2 MEMS device using an actuator 有权
使用致动器的MEMS器件

MEMS device using an actuator
Abstract:
A micro-electro-mechanical system (MEMS) includes a first electrode interposed between a first fixed end and a second fixed end, the first electrode being movable by an actuator element. The MEMS also includes a substrate on which the first and second fixed ends are located. The MEMS further includes a second electrode formed on the substrate to face the first electrode. A shape from the first electrode to the first fixed end and a shape from the first electrode to the second fixed end are asymmetrical, the first electrode to be lowered to the second electrode.
Public/Granted literature
Information query
Patent Agency Ranking
0/0