Invention Grant
- Patent Title: MEMS device using an actuator
- Patent Title (中): 使用致动器的MEMS器件
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Application No.: US11746813Application Date: 2007-05-10
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Publication No.: US07940514B2Publication Date: 2011-05-10
- Inventor: Tamio Ikehashi
- Applicant: Tamio Ikehashi
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2006-134011 20060512
- Main IPC: H01G5/00
- IPC: H01G5/00 ; H01G7/00

Abstract:
A micro-electro-mechanical system (MEMS) includes a first electrode interposed between a first fixed end and a second fixed end, the first electrode being movable by an actuator element. The MEMS also includes a substrate on which the first and second fixed ends are located. The MEMS further includes a second electrode formed on the substrate to face the first electrode. A shape from the first electrode to the first fixed end and a shape from the first electrode to the second fixed end are asymmetrical, the first electrode to be lowered to the second electrode.
Public/Granted literature
- US20070262400A1 MEMS DEVICE USING AN ACTUATOR Public/Granted day:2007-11-15
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