Invention Grant
- Patent Title: Method for generating a micromechanical structure
- Patent Title (中): 用于产生微机械结构的方法
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Application No.: US12058835Application Date: 2008-03-31
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Publication No.: US07940439B2Publication Date: 2011-05-10
- Inventor: Denis Jung , Christian Drabe , Thilo Sandner , Harald Schenk , Thomas Klose , Alexander Wolter
- Applicant: Denis Jung , Christian Drabe , Thilo Sandner , Harald Schenk , Thomas Klose , Alexander Wolter
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee Address: DE Munich
- Agency: Keating & Bennett, LLP
- Priority: DE102007015720 20070402; DE102008013116 20080307
- Main IPC: G02B26/08
- IPC: G02B26/08 ; H01L21/46
Abstract:
In a method for manufacturing a micromechanical structure, first a two-dimensional structure is formed in a substrate. The two-dimensional structure is deflected from the substrate plane by action of force and fixed in the deflected state.
Public/Granted literature
- US20080242049A1 METHOD FOR GENERATING A MICROMECHANICAL STRUCTURE Public/Granted day:2008-10-02
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