Invention Grant
- Patent Title: System for testing semiconductors
- Patent Title (中): 半导体测试系统
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Application No.: US12653574Application Date: 2009-12-15
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Publication No.: US07940069B2Publication Date: 2011-05-10
- Inventor: Peter Andrews , David Hess
- Applicant: Peter Andrews , David Hess
- Applicant Address: US OR Beaverton
- Assignee: Cascade Microtech, Inc.
- Current Assignee: Cascade Microtech, Inc.
- Current Assignee Address: US OR Beaverton
- Agency: Chernoff, Vilhauer, McClung & Stenzel
- Main IPC: G01R31/02
- IPC: G01R31/02
Abstract:
A testing system that includes an plural imaging devices capturing plural video sequences from a single optical path and concurrently displaying the video sequences for effectively positioning a probe for testing a semiconductor wafer.
Public/Granted literature
- US20100097467A1 System for testing semiconductors Public/Granted day:2010-04-22
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