Invention Grant
US07939938B2 Functional device package with metallization arrangement for improved bondability of two substrates 有权
具有金属化布置的功能器件封装,用于改善两个衬底的粘合性

Functional device package with metallization arrangement for improved bondability of two substrates
Abstract:
A packaging structure for hermetically sealing a functional device by solder connection at a wafer level in which a first Si substrate having a concave portion metallized on its internal surface and a second Si substrate metallized at a position opposed to said concave portion are used, the metallization applied to the internal surface of the concave portion of the first Si substrate and the metallization applied to the second Si substrate at the position opposed to the concave portion are connected by molten solder to hermetically seal the functional device between the first Si substrate and the second Si substrate, whereby the wettability of the solder for the two Si substrates is improved, the bondability between the Si substrates is enhanced, and the yield at which the package is manufactured is improved.
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