Invention Grant
- Patent Title: Active matrix display device
- Patent Title (中): 主动矩阵显示装置
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Application No.: US12346250Application Date: 2008-12-30
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Publication No.: US07939822B2Publication Date: 2011-05-10
- Inventor: Shinji Maekawa , Hideaki Kuwabara
- Applicant: Shinji Maekawa , Hideaki Kuwabara
- Applicant Address: JP Kanagawa-Ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Kanagawa-Ken
- Agency: Nixon Peabody LLP
- Agent Jeffrey L. Costellia
- Priority: JP2005-027312 20050203
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L21/339 ; H01L21/00 ; H01L21/44
Abstract:
The present invention provides a manufacturing process using a droplet-discharging method that is suitable for manufacturing a large substrate in mass production. A photosensitive material solution of a conductive film is selectively discharged by a droplet-discharging method, selectively exposed to laser light, and developed or etched, thereby allowing only the region exposed to laser light to be left and realizing a source wiring and a drain wiring having a more microscopic pattern than the pattern itself formed by discharging. One feature of the source wiring and the drain wiring is that the source wiring and the drain wiring cross an island-like semiconductor layer and overlap it.
Public/Granted literature
- US20090152541A1 ELECTRONIC DEVICE, SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2009-06-18
Information query
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