Invention Grant
US07939412B2 Process for forming an electronic device including a fin-type transistor structure 有权
用于形成包括鳍型晶体管结构的电子器件的工艺

Process for forming an electronic device including a fin-type transistor structure
Abstract:
An electronic device can include an insulating layer and a fin-type transistor structure. The fin-type structure can have a semiconductor fin and a gate electrode spaced apart from each other. A dielectric layer and a spacer structure can lie between the semiconductor fin and the gate electrode. The semiconductor fin can include channel region including a portion associated with a relatively higher VT lying between a portion associated with a relatively lower VT and the insulating layer. In one embodiment, the supply voltage is lower than the relatively higher VT of the channel region. A process for forming the electronic device is also disclosed.
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