Invention Grant
US07939412B2 Process for forming an electronic device including a fin-type transistor structure
有权
用于形成包括鳍型晶体管结构的电子器件的工艺
- Patent Title: Process for forming an electronic device including a fin-type transistor structure
- Patent Title (中): 用于形成包括鳍型晶体管结构的电子器件的工艺
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Application No.: US12753226Application Date: 2010-04-02
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Publication No.: US07939412B2Publication Date: 2011-05-10
- Inventor: Marius K. Orlowski , James D. Burnett
- Applicant: Marius K. Orlowski , James D. Burnett
- Applicant Address: US TX Austin
- Assignee: Freescale Semiconductor, Inc.
- Current Assignee: Freescale Semiconductor, Inc.
- Current Assignee Address: US TX Austin
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
An electronic device can include an insulating layer and a fin-type transistor structure. The fin-type structure can have a semiconductor fin and a gate electrode spaced apart from each other. A dielectric layer and a spacer structure can lie between the semiconductor fin and the gate electrode. The semiconductor fin can include channel region including a portion associated with a relatively higher VT lying between a portion associated with a relatively lower VT and the insulating layer. In one embodiment, the supply voltage is lower than the relatively higher VT of the channel region. A process for forming the electronic device is also disclosed.
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