Invention Grant
- Patent Title: Phase change memory devices and methods of forming the same
- Patent Title (中): 相变存储器件及其形成方法
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Application No.: US12219647Application Date: 2008-07-25
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Publication No.: US07939366B2Publication Date: 2011-05-10
- Inventor: Yoon-Jong Song , Seung-Pil Ko , Dong-Won Lim
- Applicant: Yoon-Jong Song , Seung-Pil Ko , Dong-Won Lim
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2007-0074619 20070725
- Main IPC: H01L21/06
- IPC: H01L21/06

Abstract:
A method of forming a phase change memory device includes forming a core pattern on a substrate, conformally forming a heat conductive layer on the substrate including the core pattern, anisotropically etching the heat conductive layer down to a top surface of the core pattern to form a heat electrode surrounding a sidewall of the core pattern, and forming a phase change memory pattern connected to a top surface of the heat electrode.
Public/Granted literature
- US20090026436A1 Phase change memory devices and methods of forming the same Public/Granted day:2009-01-29
Information query
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