Invention Grant
- Patent Title: Selective area metal bonding Si-based laser
- Patent Title (中): 选择性区域金属键合Si基激光器
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Application No.: US12539500Application Date: 2009-08-11
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Publication No.: US07939352B2Publication Date: 2011-05-10
- Inventor: Guogang Qin , Tao Hong , Ting Chen , Guangzhao Ran , Weixi Chen
- Applicant: Guogang Qin , Tao Hong , Ting Chen , Guangzhao Ran , Weixi Chen
- Applicant Address: CN Beijing
- Assignee: Peking University
- Current Assignee: Peking University
- Current Assignee Address: CN Beijing
- Agency: Seed IP Law Group PLLC
- Priority: CN200810226036 20081104
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for fabricating a selective area metal bonding Si-based laser, optically or electrically pumped includes: forming a Si waveguide area and a bonding area in a Silicon-On-Insulator (SOI) wafer, and forming an isolating structure to separate the Si waveguide area from the bonding area; forming a metal multilayer for bonding, which also acts as ohmic contact layer in the laser when the laser is electrically pumped. A compound semiconductor optical gain structure is prepared by epitaxial growth and etched off the substrate. The compound semiconductor optical gain structure is aligned with the Si waveguide area in the SOI wafer and the compound semiconductor optical gain structure is bonded on the SOI wafer. The selective area metal bonding Si-based laser can be used as a light source in optoelectronic integration and Si photonics. The method may provide simple operation, flexibility, low cost, and low requirement for cleanness of manufacturing environments.
Public/Granted literature
- US20100111128A1 SELECTIVE AREA METAL BONDING Si-BASED LASER Public/Granted day:2010-05-06
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