Invention Grant
- Patent Title: Supply end block for rotary magnetron
- Patent Title (中): 供应旋转磁控管的端块
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Application No.: US11873532Application Date: 2007-10-17
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Publication No.: US07938943B2Publication Date: 2011-05-10
- Inventor: Hans-Juergen Heinrich , Goetz Teschner , Thorsten Sander , Cornell Weidelt , Joern Brueckner
- Applicant: Hans-Juergen Heinrich , Goetz Teschner , Thorsten Sander , Cornell Weidelt , Joern Brueckner
- Applicant Address: DE Dresden
- Assignee: Von Ardenne Anlagentechnic GmbH
- Current Assignee: Von Ardenne Anlagentechnic GmbH
- Current Assignee Address: DE Dresden
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Priority: DE102006049497 20061017
- Main IPC: C23C14/34
- IPC: C23C14/34

Abstract:
A supply end block to supply a sputter cathode with a coolant and electrical voltage, includes a housing with a coolant connection and a current connection as well as a support shaft mounted to rotate, on which a target tube is fastened. The coolant connection and current connection are brought together directly at a feed site so that the coolant is brought to the potential of the applied electric voltage on entering the housing of the end block. Optimal cooling of the current feed is achieved, and optimal potential equalization of the coolant simultaneously occurs.
Public/Granted literature
- US20080128276A1 SUPPLY END BLOCK FOR ROTARY MAGNETRON Public/Granted day:2008-06-05
Information query
IPC分类: